TTL Laser AF (Universal Type)
This Laser AF system features a 0.5 second focusing speed with a repeatability as high as 0.5μm.
Focusing Aid (FA)
The newly developed split-prism Focusing Aid (FA) delivers sharp patterns to allow accurate focusing during Z-axis measurements.
Measurement errors due to differences in the depth of focus of different objectives are minimized.
Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders